{"id":1840,"date":"2019-05-22T02:48:24","date_gmt":"2019-05-22T02:48:24","guid":{"rendered":"http:\/\/www.meetyoucarbide.com\/single-post-what-is-diamond-coated-carbide\/"},"modified":"2020-05-04T13:12:02","modified_gmt":"2020-05-04T13:12:02","slug":"what-is-diamond-coated-carbide","status":"publish","type":"post","link":"https:\/\/www.meetyoucarbide.com\/vi\/what-is-diamond-coated-carbide\/","title":{"rendered":"Kim c\u01b0\u01a1ng ph\u1ee7 cacbua l\u00e0 g\u00ec?"},"content":{"rendered":"<div class=\"vgblk-rw-wrapper limit-wrapper\">\n<div>\n<h2>1. Gi\u1edbi thi\u1ec7u kim c\u01b0\u01a1ng CVD<\/h2>\n<div>Kim c\u01b0\u01a1ng l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD) \u0111\u1ec1 c\u1eadp \u0111\u1ebfn vi\u1ec7c s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p CVD, trong \u0111i\u1ec1u ki\u1ec7n \u00e1p su\u1ea5t th\u1ea5p, v\u1edbi c\u00e1c kh\u00ed c\u00f3 ch\u1ee9a carbon nh\u01b0 H2 v\u00e0 CH4 l\u00e0m kh\u00ed ph\u1ea3n \u1ee9ng, ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc trong \u0111i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 v\u00e0 nhi\u1ec7t \u0111\u1ed9 nh\u1ea5t \u0111\u1ecbnh, d\u1eabn \u0111\u1ebfn h\u1ea1t r\u1eafn l\u1eafng \u0111\u1ecdng Kim c\u01b0\u01a1ng thu \u0111\u01b0\u1ee3c tr\u00ean b\u1ec1 m\u1eb7t ch\u1ea5t n\u1ec1n n\u00f3ng. T\u01b0\u01a1ng t\u1ef1 nh\u01b0 kim c\u01b0\u01a1ng t\u1ef1 nhi\u00ean, kim c\u01b0\u01a1ng CVD l\u00e0 m\u1ed9t tinh th\u1ec3 c\u1ee7a m\u1ed9t nguy\u00ean t\u1eed carbon duy nh\u1ea5t v\u00e0 thu\u1ed9c m\u1ed9t h\u1ec7 th\u1ed1ng kh\u1ed1i. M\u1ed7i nguy\u00ean t\u1eed C trong tinh th\u1ec3 t\u1ea1o th\u00e0nh li\u00ean k\u1ebft c\u1ed9ng h\u00f3a tr\u1ecb v\u1edbi qu\u1ef9 \u0111\u1ea1o lai 4 sp v\u00e0 4 nguy\u00ean t\u1eed C kh\u00e1c, v\u00e0 c\u00f3 l\u1ef1c li\u00ean k\u1ebft m\u1ea1nh v\u00e0 \u1ed5n \u0111\u1ecbnh. B\u1ea3n ch\u1ea5t v\u00e0 \u0111\u1ecbnh h\u01b0\u1edbng; \u0111\u1ed9 d\u00e0i li\u00ean k\u1ebft v\u00e0 g\u00f3c li\u00ean k\u1ebft gi\u1eefa c\u00e1c nguy\u00ean t\u1eed C v\u00e0 nguy\u00ean t\u1eed C b\u1eb1ng nhau v\u00e0 ch\u00fang \u0111\u01b0\u1ee3c s\u1eafp x\u1ebfp theo c\u1ea5u tr\u00fac m\u1ea1ng kh\u00f4ng gian l\u00fd t\u01b0\u1edfng, l\u00e0m cho kim c\u01b0\u01a1ng CVD th\u1ec3 hi\u1ec7n c\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc, nhi\u1ec7t, quang v\u00e0 \u0111i\u1ec7n c\u1ee7a kim c\u01b0\u01a1ng t\u1ef1 nhi\u00ean. Hi\u1ec7u su\u1ea5t to\u00e0n di\u1ec7n<\/div>\n<div>Nh\u01b0 ch\u00fang ta \u0111\u00e3 bi\u1ebft, tr\u1eef l\u01b0\u1ee3ng kim c\u01b0\u01a1ng t\u1ef1 nhi\u00ean trong th\u1ebf gi\u1edbi t\u1ef1 nhi\u00ean, chi ph\u00ed khai th\u00e1c cao, gi\u00e1 c\u1ea3 \u0111\u1eaft \u0111\u1ecf, r\u1ea5t kh\u00f3 \u0111\u1ec3 qu\u1ea3ng b\u00e1 r\u1ed9ng r\u00e3i \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c c\u00f4ng nghi\u1ec7p. Do \u0111\u00f3, vi\u1ec7c t\u1ed5ng h\u1ee3p kim c\u01b0\u01a1ng b\u1eb1ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p nh\u00e2n t\u1ea1o nh\u01b0 nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 \u00e1p su\u1ea5t cao (HTHP) v\u00e0 CVD \u0111\u00e3 d\u1ea7n tr\u1edf th\u00e0nh c\u00e1ch ch\u00ednh \u0111\u1ec3 m\u1ecdi ng\u01b0\u1eddi c\u00f3 \u0111\u01b0\u1ee3c nh\u1eefng v\u1eadt li\u1ec7u tuy\u1ec7t v\u1eddi nh\u01b0 v\u1eady v\u1edbi c\u00e1c \u0111\u1eb7c t\u00ednh tuy\u1ec7t v\u1eddi. C\u00e1c s\u1ea3n ph\u1ea9m kim c\u01b0\u01a1ng \u0111\u01b0\u1ee3c t\u1ed5ng h\u1ee3p b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p HTHP th\u01b0\u1eddng \u1edf tr\u1ea1ng th\u00e1i c\u00e1c h\u1ea1t \u0111\u01a1n tinh th\u1ec3 r\u1eddi r\u1ea1c. M\u1eb7c d\u00f9 ph\u01b0\u01a1ng ph\u00e1p HTHP \u0111\u00e3 c\u00f3 th\u1ec3 t\u1ed5ng h\u1ee3p c\u00e1c tinh th\u1ec3 \u0111\u01a1n l\u1edbn c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n 10 mm v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a khoa h\u1ecdc v\u00e0 c\u00f4ng ngh\u1ec7, c\u00e1c s\u1ea3n ph\u1ea9m hi\u1ec7n t\u1ea1i v\u1eabn ch\u1ee7 y\u1ebfu l\u00e0 c\u00e1c tinh th\u1ec3 \u0111\u01a1n c\u00f3 \u0111\u01b0\u1eddng k\u00ednh t\u1eeb 5 mm tr\u1edf xu\u1ed1ng. V\u00e0 ch\u1ee7 y\u1ebfu l\u00e0 b\u1ed9t kim c\u01b0\u01a1ng. Ng\u01b0\u1ee3c l\u1ea1i, k\u00edch th\u01b0\u1edbc c\u1ee7a tinh th\u1ec3 \u0111\u01a1n kim c\u01b0\u01a1ng \u0111\u01b0\u1ee3c t\u1ed5ng h\u1ee3p b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh b\u1eb1ng k\u00edch th\u01b0\u1edbc c\u1ee7a tinh th\u1ec3 h\u1ea1t v\u00e0 c\u0169ng c\u00f3 th\u1ec3 thu \u0111\u01b0\u1ee3c m\u1ed9t tinh th\u1ec3 kim c\u01b0\u01a1ng c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng nhi\u1ec1u ph\u01b0\u01a1ng ph\u00e1p t\u0103ng tr\u01b0\u1edfng v\u00e0 kh\u1ea3m kh\u1ea3m. Ngo\u00e0i ra, ph\u01b0\u01a1ng ph\u00e1p CVD c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 chu\u1ea9n b\u1ecb c\u00e1c b\u1ed9 phim t\u1ef1 h\u1ed7 tr\u1ee3 kim c\u01b0\u01a1ng di\u1ec7n t\u00edch l\u1edbn b\u1eb1ng c\u00e1ch l\u1eafng \u0111\u1ecdng d\u1ecb v\u00f2ng ho\u1eb7c ph\u1ee7 kim c\u01b0\u01a1ng tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a c\u00e1c h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p kh\u00e1c nhau \u0111\u1ec3 t\u1ea1o th\u00e0nh l\u1edbp ph\u1ee7 ch\u1ed1ng m\u00e0i m\u00f2n ho\u1eb7c b\u1ea3o v\u1ec7, gi\u00fap m\u1edf r\u1ed9ng \u0111\u00e1ng k\u1ec3 \u1ee9ng d\u1ee5ng kim c\u01b0\u01a1ng. C\u00f3 th\u1ec3 th\u1ea5y r\u1eb1ng kim c\u01b0\u01a1ng CVD c\u00f3 r\u1ea5t nhi\u1ec1u tri\u1ec3n v\u1ecdng \u1ee9ng d\u1ee5ng trong nhi\u1ec1u l\u0129nh v\u1ef1c nh\u01b0 gia c\u00f4ng, qu\u1ed1c ph\u00f2ng v\u00e0 c\u00f4ng nghi\u1ec7p h\u1ea1t nh\u00e2n. Trong s\u1ed1 \u0111\u00f3, \u1ee9ng d\u1ee5ng trong ng\u00e0nh gia c\u00f4ng ch\u1ee7 y\u1ebfu bao g\u1ed3m m\u00e1y m\u00e0i b\u00e1nh xe, b\u00fat c\u1eaft t\u1ec9a, c\u00e1c d\u1ee5ng c\u1ee5 c\u1eaft kh\u00e1c nhau, v.v. Khi \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c kh\u00eda c\u1ea1nh n\u00e0y, ch\u1ec9 c\u00f3 \u0111\u1ed9 c\u1ee9ng, kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00f2n v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc c\u1ee7a kim c\u01b0\u01a1ng, v\u00e0 \u0111\u1ed9 trong su\u1ed1t kh\u00f4ng c\u1ea7n thi\u1ebft. C\u00e1c t\u00ednh ch\u1ea5t nh\u01b0 m\u1ea5t \u0111i\u1ec7n m\u00f4i v\u00e0 chu\u1ea9n b\u1ecb s\u1ea3n ph\u1ea9m t\u01b0\u01a1ng \u0111\u1ed1i d\u1ec5 d\u00e0ng, v\u00ec v\u1eady \u1ee9ng d\u1ee5ng tr\u00ean c\u00f4ng c\u1ee5 n\u00e0y l\u00e0 l\u0129nh v\u1ef1c ch\u00ednh c\u1ee7a \u1ee9ng d\u1ee5ng c\u00f4ng nghi\u1ec7p quy m\u00f4 l\u1edbn c\u1ee7a kim c\u01b0\u01a1ng CVD.<\/div>\n<h2>2. C\u00f4ng c\u1ee5 cacbua m\u1ea1 kim c\u01b0\u01a1ng CVD<\/h2>\n<div>M\u00e1y c\u1eaft kim c\u01b0\u01a1ng hi\u1ec7n c\u00f3 tr\u00ean th\u1ecb tr\u01b0\u1eddng ch\u1ee7 y\u1ebfu bao g\u1ed3m c\u00e1c c\u00f4ng c\u1ee5 kim c\u01b0\u01a1ng \u0111\u01a1n tinh th\u1ec3, c\u00f4ng c\u1ee5 kim c\u01b0\u01a1ng \u0111a tinh th\u1ec3 (PCD), c\u00f4ng c\u1ee5 h\u00e0n m\u00e0ng kim c\u01b0\u01a1ng d\u00e0y v\u00e0 c\u00f4ng c\u1ee5 tr\u00e1ng kim c\u01b0\u01a1ng. Hai th\u1ee9 hai l\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng c\u1ee7a kim c\u01b0\u01a1ng CVD nh\u01b0 m\u1ed9t c\u00f4ng c\u1ee5. Trong s\u1ed1 \u0111\u00f3, c\u00f4ng c\u1ee5 h\u00e0n m\u00e0ng kim c\u01b0\u01a1ng d\u00e0y th\u01b0\u1eddng \u0111\u01b0\u1ee3c chu\u1ea9n b\u1ecb b\u1eb1ng c\u00e1ch c\u1eaft m\u1ed9t m\u00e0ng d\u00e0y kim c\u01b0\u01a1ng t\u1ef1 h\u1ed7 tr\u1ee3 CVD c\u00f3 \u0111\u1ed9 d\u00e0y 0,3 mm tr\u1edf l\u00ean v\u00e0 sau \u0111\u00f3 h\u00e0n n\u00f3 tr\u00ean \u0111\u1ebf. B\u1edfi v\u00ec m\u00e0ng d\u00e0y kim c\u01b0\u01a1ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c c\u1eaft th\u00e0nh b\u1ea5t k\u1ef3 h\u00ecnh d\u1ea1ng hai chi\u1ec1u, ch\u00fang \u00edt t\u1ed1n k\u00e9m v\u00e0 linh ho\u1ea1t h\u01a1n so v\u1edbi c\u00e1c c\u00f4ng c\u1ee5 \u0111\u01a1n tinh th\u1ec3. Ngo\u00e0i ra, Co-bond kh\u00f4ng \u0111\u01b0\u1ee3c \u0111\u01b0a v\u00e0o m\u00e0ng d\u00e0y kim c\u01b0\u01a1ng so v\u1edbi c\u00e1c c\u00f4ng c\u1ee5 PCD. \u0110\u1ed9 ch\u00ednh x\u00e1c gia c\u00f4ng cao v\u00e0 t\u1ef7 l\u1ec7 hao m\u00f2n cao.<\/div>\n<div>\u0110\u1ed1i v\u1edbi c\u00e1c c\u00f4ng c\u1ee5 \u0111\u01b0\u1ee3c ph\u1ee7 kim c\u01b0\u01a1ng, ph\u01b0\u01a1ng ph\u00e1p CVD \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u00e1p d\u1ee5ng m\u1ed9t l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng d\u00e0y d\u01b0\u1edbi 30 \u03bcm tr\u00ean b\u1ec1 m\u1eb7t th\u00e2n c\u00f4ng c\u1ee5. So v\u1edbi ba c\u00f4ng c\u1ee5 kh\u00e1c, ph\u01b0\u01a1ng ph\u00e1p CVD c\u00f3 th\u1ec3 \u00e1p d\u1ee5ng kim c\u01b0\u01a1ng cho c\u00e1c c\u00f4ng c\u1ee5 c\u00f3 h\u00ecnh d\u1ea1ng ph\u1ee9c t\u1ea1p bao g\u1ed3m nhi\u1ec1u m\u0169i khoan kh\u00e1c nhau, dao phay, v.v.; v\u00e0 v\u00ec l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng m\u1ecfng v\u00e0 th\u1eddi gian l\u1eafng \u0111\u1ecdng ng\u1eafn, c\u00f4ng c\u1ee5 tr\u00e1ng kh\u00f4ng c\u1ea7n ph\u1ea3i theo d\u00f5i. Ch\u1ebf bi\u1ebfn, do \u0111\u00f3 chi ph\u00ed th\u1ea5p.<\/div>\n<div>Do \u0111\u00f3, ph\u00e2n t\u00edch th\u1ecb tr\u01b0\u1eddng c\u00f4ng c\u1ee5 hi\u1ec7n t\u1ea1i th\u01b0\u1eddng tin r\u1eb1ng c\u00e1c c\u00f4ng c\u1ee5 ph\u1ee7 kim c\u01b0\u01a1ng CVD s\u1ebd l\u00e0 m\u1ed9t trong nh\u1eefng h\u01b0\u1edbng ph\u00e1t tri\u1ec3n quan tr\u1ecdng nh\u1ea5t c\u1ee7a ng\u00e0nh c\u00f4ng c\u1ee5. Trong s\u1ed1 nhi\u1ec1u v\u1eadt li\u1ec7u d\u1ee5ng c\u1ee5, cacbua xi m\u0103ng WC-Co \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t. N\u00f3 kh\u00f4ng ch\u1ec9 c\u00f3 \u0111\u1ed9 c\u1ee9ng cao, \u1ed5n \u0111\u1ecbnh nhi\u1ec7t tuy\u1ec7t v\u1eddi, m\u00e0 c\u00f2n c\u00f3 \u0111\u1ed9 b\u1ec1n cao v\u00e0 \u0111\u1ed9 d\u1ebbo dai t\u1ed1t. N\u00f3 l\u00e0 l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng l\u00fd t\u01b0\u1edfng. V\u1eadt li\u1ec7u c\u01a1 s\u1edf l\u1edbp c\u00f4ng c\u1ee5. C\u00e1c c\u00f4ng c\u1ee5 c\u1eaft cacbua \u0111\u01b0\u1ee3c ph\u1ee7 kim c\u01b0\u01a1ng CVD ph\u1ee7 kim c\u01b0\u01a1ng CVD \u0111\u01b0\u1ee3c \u0111i\u1ec1u ch\u1ebf t\u1eeb kim c\u01b0\u01a1ng CVD tr\u00ean b\u1ec1 m\u1eb7t cacbua xi m\u0103ng WC-Co c\u00f3 th\u1ec3 k\u1ebft h\u1ee3p ho\u00e0n h\u1ea3o kh\u1ea3 n\u0103ng ch\u1ed1ng m\u00e0i m\u00f2n tuy\u1ec7t v\u1eddi c\u1ee7a kim c\u01b0\u01a1ng, t\u1ea3n nhi\u1ec7t v\u00e0 \u0111\u1ed9 b\u1ec1n t\u1ed1t c\u1ee7a cacbua xi m\u0103ng. Gi\u1ea3i quy\u1ebft hi\u1ec7u qu\u1ea3 m\u00e2u thu\u1eabn gi\u1eefa \u0111\u1ed9 c\u1ee9ng v\u00e0 \u0111\u1ed9 d\u1ebbo dai c\u1ee7a v\u1eadt li\u1ec7u d\u1ee5ng c\u1ee5 hi\u1ec7n c\u00f3 v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3 hi\u1ec7u su\u1ea5t c\u1eaft v\u00e0 tu\u1ed5i th\u1ecd c\u1ee7a d\u1ee5ng c\u1ee5 cacbua. Trong kim lo\u1ea1i m\u00e0u v\u00e0 h\u1ee3p kim c\u1ee7a n\u00f3, c\u00e1c h\u1ea1t ho\u1eb7c v\u1eadt li\u1ec7u composite c\u1ed1t s\u1ee3i kh\u00e1c nhau, g\u1ed1m hi\u1ec7u su\u1ea5t cao v\u00e0 x\u1eed l\u00fd v\u1eadt li\u1ec7u kh\u00e1c L\u0129nh v\u1ef1c n\u00e0y c\u00f3 tri\u1ec3n v\u1ecdng \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i.<\/div>\n<p><img decoding=\"async\" src=\"https:\/\/www.meetyoucarbide.com\/wp-content\/uploads\/2019\/05\/141d2f_ffff76c014754249be80b35b1c7b26d2mv2-1.png\" alt=\"\" title=\"\"><\/p>\n<div>H\u00ecnh 1 C\u00e1c c\u1ea1nh c\u1eaft c\u1ee7a (a) c\u00f4ng c\u1ee5 kh\u00f4ng tr\u00e1ng v\u00e0 (b) c\u00f4ng c\u1ee5 ph\u1ee7 kim c\u01b0\u01a1ng sau khi th\u1eed nghi\u1ec7m c\u1eaft<\/div>\n<p><img decoding=\"async\" src=\"https:\/\/www.meetyoucarbide.com\/wp-content\/uploads\/2019\/05\/141d2f_4975d6a37d2c4c378519796a5e2e6d5cmv2-1.png\" alt=\"\" title=\"\"><\/p>\n<div>H\u00ecnh 2 K\u1ebft th\u00fac \u0111\u1ea1i di\u1ec7n c\u00e1c k\u00eanh \u0111\u01b0\u1ee3c phay b\u1eb1ng h\u1ee3p kim Al sau khi \u0111\u01b0\u1ee3c c\u1eaft b\u1eb1ng (a) c\u00f4ng c\u1ee5 kh\u00f4ng tr\u00e1ng v\u00e0 (b) c\u00f4ng c\u1ee5 tr\u00e1ng kim c\u01b0\u01a1ng<\/div>\n<div>T\u00f3m l\u1ea1i, c\u00e1c c\u00f4ng c\u1ee5 cacbua ph\u1ee7 kim c\u01b0\u01a1ng th\u1ec3 hi\u1ec7n hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi v\u1ec1 m\u1eb7t ti\u1ec7n, phay v\u00e0 khoan. V\u00ed d\u1ee5, \u0111\u1ed9 m\u00e0i m\u00f2n c\u1ee7a l\u01b0\u1ee1i c\u1eaft nh\u1ecf, tu\u1ed5i th\u1ecd d\u00e0i v\u00e0 gia c\u00f4ng kh\u00f4ng ph\u1ea3i l\u00e0 d\u00ednh d\u00ednh v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c x\u1eed l\u00fd cao. Do \u0111\u00f3, so v\u1edbi c\u00e1c c\u00f4ng c\u1ee5 kh\u00e1c, c\u00f4ng c\u1ee5 cacbua ph\u1ee7 kim c\u01b0\u01a1ng c\u00f3 th\u1ec3 \u0111\u00e1p \u1ee9ng t\u1ed1t h\u01a1n c\u00e1c y\u00eau c\u1ea7u x\u1eed l\u00fd c\u1ee7a v\u1eadt li\u1ec7u m\u1edbi hi\u1ec7n t\u1ea1i v\u00e0 c\u1eaft si\u00eau ch\u00ednh x\u00e1c.<\/div>\n<h2>3. C\u00e1c v\u1ea5n \u0111\u1ec1 v\u00e0 gi\u1ea3i ph\u00e1p c\u1ee7a c\u00f4ng c\u1ee5 cacbua ph\u1ee7 kim c\u01b0\u01a1ng CVD<\/h2>\n<div>M\u1eb7c d\u00f9 m\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn k\u1ebft qu\u1ea3 nghi\u00ean c\u1ee9u \u0111\u00e3 ch\u1ec9 ra r\u1eb1ng c\u00e1c c\u00f4ng c\u1ee5 cacbua ph\u1ee7 kim c\u01b0\u01a1ng CVD c\u00f3 hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi v\u00e0 tu\u1ed5i th\u1ecd d\u00e0i, nh\u01b0ng c\u0169ng c\u00f3 b\u00e1o c\u00e1o v\u1ec1 c\u00e1c th\u1eed nghi\u1ec7m s\u1ea3n xu\u1ea5t th\u00e0nh c\u00f4ng c\u1ee7a m\u1ed9t s\u1ed1 nh\u00e0 s\u1ea3n xu\u1ea5t trong v\u00e0 ngo\u00e0i n\u01b0\u1edbc. Nh\u01b0ng cho \u0111\u1ebfn nay, c\u00f4ng c\u1ee5 n\u00e0y \u0111\u00e3 kh\u00f4ng \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng trong s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p quy m\u00f4 l\u1edbn. L\u00fd do ch\u00ednh l\u00e0 c\u00e1c c\u00f4ng c\u1ee5 ph\u1ee7 kim c\u01b0\u01a1ng hi\u1ec7n \u0111ang s\u1ea3n xu\u1ea5t v\u1eabn c\u00f3 v\u1ea5n \u0111\u1ec1 nh\u01b0 \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft th\u1ea5p gi\u1eefa l\u1edbp ph\u1ee7 v\u00e0 ch\u1ea5t n\u1ec1n, \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t l\u1edbn c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh ch\u1ea5t l\u01b0\u1ee3ng k\u00e9m. Trong s\u1ed1 \u0111\u00f3, c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft th\u1ea5p c\u1ee7a l\u1edbp ph\u1ee7 l\u00e0 m\u1ed9t tr\u1edf ng\u1ea1i k\u1ef9 thu\u1eadt quan tr\u1ecdng h\u1ea1n ch\u1ebf \u1ee9ng d\u1ee5ng quy m\u00f4 l\u1edbn c\u1ee7a c\u00f4ng c\u1ee5 n\u00e0y.<\/div>\n<div>L\u00fd do ch\u00ednh cho \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft th\u1ea5p c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng l\u00e0 s\u1ef1 hi\u1ec7n di\u1ec7n c\u1ee7a c\u00e1c pha li\u00ean k\u1ebft Co trong ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng. \u1ede nhi\u1ec7t \u0111\u1ed9 l\u1eafng kim c\u01b0\u01a1ng CVD (600 ~ 1200 \u00b0 C), Co c\u00f3 \u00e1p su\u1ea5t h\u01a1i b\u00e3o h\u00f2a cao, s\u1ebd nhanh ch\u00f3ng khu\u1ebfch t\u00e1n l\u00ean b\u1ec1 m\u1eb7t ch\u1ea5t n\u1ec1n, \u1ee9c ch\u1ebf qu\u00e1 tr\u00ecnh t\u1ea1o m\u1ea7m v\u00e0 t\u0103ng tr\u01b0\u1edfng kim c\u01b0\u01a1ng, v\u00e0 x\u00fac t\u00e1c cho s\u1ef1 h\u00ecnh th\u00e0nh than ch\u00ec v\u00e0 carbon v\u00f4 \u0111\u1ecbnh h\u00ecnh, d\u1eabn \u0111\u1ebfn l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 C\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft gi\u1eefa c\u00e1c ch\u1ea5t n\u1ec1n cacbua b\u1ecb gi\u1ea3m. Ngo\u00e0i ra, s\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 t\u00ednh ch\u1ea5t v\u1eadt l\u00fd nh\u01b0 h\u1eb1ng s\u1ed1 m\u1ea1ng, \u0111\u1ed9 c\u1ee9ng v\u00e0 h\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t (CTE) gi\u1eefa v\u1eadt li\u1ec7u cacbua kim c\u01b0\u01a1ng v\u00e0 xi m\u0103ng c\u0169ng l\u00e0 m\u1ed9t nguy\u00ean nh\u00e2n ch\u00ednh c\u1ee7a c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft th\u1ea5p c\u1ee7a l\u1edbp ph\u1ee7.<\/div>\n<div>Kim c\u01b0\u01a1ng l\u00e0 m\u1ed9t tinh th\u1ec3 h\u00ecnh kh\u1ed1i \u0111\u1eb7t ch\u00ednh gi\u1eefa m\u1eb7t v\u1edbi h\u1eb1ng s\u1ed1 m\u1ea1ng a0 = 0,35667nm, \u0111\u1ed9 c\u1ee9ng 60 ~ 100 GPa v\u00e0 CTE l\u00e0 0,8 ~ 4,5 \u00d7 10-6 \/ \u00b0 C. C\u00e1c cacbua xi m\u0103ng bao g\u1ed3m ch\u1ee7 y\u1ebfu l\u00e0 c\u00e1c h\u1ea1t WC v\u00e0 ch\u1ea5t k\u1ebft d\u00ednh Co. WC \u0110\u1ed1i v\u1edbi c\u1ea5u tr\u00fac tinh th\u1ec3 l\u1ee5c gi\u00e1c \u0111\u00f3ng k\u00edn, h\u1eb1ng s\u1ed1 m\u1ea1ng a = 0,30008nm, c = 0,47357nm, \u0111\u1ed9 c\u1ee9ng c\u1ee7a cacbua xi m\u0103ng l\u00e0 kho\u1ea3ng 17 GPa, v\u00e0 CTE l\u00e0 kho\u1ea3ng 4,6 \u00d7 10-6 \/ \u00b0 C. Nh\u1eefng kh\u00e1c bi\u1ec7t n\u00e0y s\u1ebd d\u1eabn \u0111\u1ebfn l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 \u1ee8ng su\u1ea5t nhi\u1ec7t t\u1ea1i giao di\u1ec7n c\u1ee7a ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng kh\u00f4ng c\u00f3 l\u1ee3i cho s\u1ef1 b\u00e1m d\u00ednh c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng tr\u00ean ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng.<\/div>\n<div>M\u1ed9t s\u1ed1 l\u01b0\u1ee3ng l\u1edbn c\u00e1c nghi\u00ean c\u1ee9u \u0111\u00e3 ch\u1ec9 ra r\u1eb1ng ti\u1ec1n x\u1eed l\u00fd b\u1ec1 m\u1eb7t c\u1ee7a ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng \u0111\u1ec3 l\u00e0m gi\u1ea3m t\u00e1c d\u1ee5ng b\u1ea5t l\u1ee3i c\u1ee7a ch\u1ea5t k\u1ebft d\u00ednh Co \u0111\u1ed1i v\u1edbi s\u1ef1 l\u1eafng \u0111\u1ecdng c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng l\u00e0 ph\u01b0\u01a1ng ph\u00e1p hi\u1ec7u qu\u1ea3 nh\u1ea5t \u0111\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng \/ cacbua xi m\u0103ng c\u01a1 ch\u1ea5t. C\u00e1c ph\u01b0\u01a1ng ph\u00e1p ti\u1ec1n x\u1eed l\u00fd ch\u00ednh hi\u1ec7n nay bao g\u1ed3m:<\/div>\n<h3>(1) X\u1eed l\u00fd b\u1ec1 m\u1eb7t Co<\/h3>\n<div>Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y th\u01b0\u1eddng \u00e1p d\u1ee5ng c\u00e1c ph\u01b0\u01a1ng ti\u1ec7n v\u1eadt l\u00fd ho\u1eb7c h\u00f3a h\u1ecdc \u0111\u1ec3 lo\u1ea1i b\u1ecf Co c\u1ee7a l\u1edbp b\u1ec1 m\u1eb7t WC-Co \u0111\u1ec3 tri\u1ec7t ti\u00eau ho\u1eb7c lo\u1ea1i b\u1ecf \u1ea3nh h\u01b0\u1edfng ti\u00eau c\u1ef1c c\u1ee7a n\u00f3 v\u00e0 c\u1ea3i thi\u1ec7n c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft gi\u1eefa l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 ch\u1ea5t n\u1ec1n. Trong s\u1ed1 \u0111\u00f3, ph\u01b0\u01a1ng ph\u00e1p \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t trong ng\u00e0nh l\u00e0 ph\u01b0\u01a1ng ph\u00e1p hai b\u01b0\u1edbc axit Axit, s\u1eed d\u1ee5ng dung d\u1ecbch Murakami (1: 1: 10 KOH + K3 [Fe (CN) 6] + H2O) \u0111\u1ec3 \u0103n m\u00f2n WC c\u00e1c h\u1ea1t v\u00e0 l\u00e0m th\u00f4 h\u1ee3p kim c\u1ee9ng. B\u1ec1 m\u1eb7t sau \u0111\u00f3 \u0111\u01b0\u1ee3c kh\u1eafc b\u1eb1ng dung d\u1ecbch axit Caro (H2SO4 + H 2 O 2) \u0111\u1ec3 lo\u1ea1i b\u1ecf b\u1ec1 m\u1eb7t. Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y c\u00f3 th\u1ec3 \u1ee9c ch\u1ebf hi\u1ec7u \u1ee9ng x\u00fac t\u00e1c \u00e2m c\u1ee7a Co \u0111\u1ebfn m\u1ed9t m\u1ee9c \u0111\u1ed9 nh\u1ea5t \u0111\u1ecbnh v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng. Tuy nhi\u00ean, sau khi x\u1eed l\u00fd, n\u00f3 s\u1ebd t\u1ea1o th\u00e0nh m\u1ed9t v\u00f9ng l\u1ecfng l\u1ebbo g\u1ea7n l\u1edbp n\u1ec1n g\u1ea7n l\u1edbp b\u1ec1 m\u1eb7t, l\u00e0m gi\u1ea3m \u0111\u1ed9 b\u1ec1n g\u00e3y c\u1ee7a d\u1ee5ng c\u1ee5 tr\u00e1ng v\u00e0 Co H\u00e0m l\u01b0\u1ee3ng ch\u1ea5t k\u1ebft d\u00ednh c\u00e0ng cao, t\u00e1c \u0111\u1ed9ng \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a d\u1ee5ng c\u1ee5 c\u00e0ng nghi\u00eam tr\u1ecdng.<\/div>\n<h3>(2) \u00c1p d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p l\u1edbp chuy\u1ec3n ti\u1ebfp<\/h3>\n<div>Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y l\u00e0 chu\u1ea9n b\u1ecb m\u1ed9t ho\u1eb7c nhi\u1ec1u l\u1edbp chuy\u1ec3n ti\u1ebfp gi\u1eefa l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng \u0111\u1ec3 ng\u0103n ch\u1eb7n s\u1ef1 khu\u1ebfch t\u00e1n c\u1ee7a Co v\u00e0 tri\u1ec7t ti\u00eau hi\u1ec7u \u1ee9ng x\u00fac t\u00e1c ti\u00eau c\u1ef1c c\u1ee7a n\u00f3 \u0111\u1ed1i v\u1edbi s\u1ef1 l\u1eafng \u0111\u1ecdng kim c\u01b0\u01a1ng. Th\u00f4ng qua l\u1ef1a ch\u1ecdn v\u00e0 thi\u1ebft k\u1ebf v\u1eadt li\u1ec7u h\u1ee3p l\u00fd, l\u1edbp chuy\u1ec3n ti\u1ebfp \u0111\u01b0\u1ee3c chu\u1ea9n b\u1ecb c\u0169ng c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m s\u1ef1 thay \u0111\u1ed5i \u0111\u1ed9t ng\u1ed9t c\u1ee7a c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd c\u1ee7a giao di\u1ec7n v\u00e0 gi\u1ea3m \u1ee9ng su\u1ea5t nhi\u1ec7t g\u00e2y ra b\u1edfi s\u1ef1 kh\u00e1c bi\u1ec7t v\u1ec1 t\u00ednh ch\u1ea5t v\u1eadt l\u00fd nh\u01b0 CTE gi\u1eefa l\u1edbp ph\u1ee7 v\u00e0 ch\u1ea5t n\u1ec1n. Vi\u1ec7c \u00e1p d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p l\u1edbp chuy\u1ec3n ti\u1ebfp n\u00f3i chung kh\u00f4ng g\u00e2y ra thi\u1ec7t h\u1ea1i cho l\u1edbp b\u1ec1 m\u1eb7t c\u1ee7a ch\u1ea5t n\u1ec1n, c\u0169ng kh\u00f4ng \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn c\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc nh\u01b0 \u0111\u1ed9 b\u1ec1n g\u00e3y c\u1ee7a d\u1ee5ng c\u1ee5 ph\u1ee7 v\u00e0 n\u00f3 c\u00f3 th\u1ec3 chu\u1ea9n b\u1ecb l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng CVD tr\u00ean c\u00e1c cacbua c\u00f3 h\u00e0m l\u01b0\u1ee3ng xi m\u0103ng cao Co , v\u00e0 do \u0111\u00f3 hi\u1ec7n \u0111ang nghi\u00ean c\u1ee9u v\u00e0 c\u1ea3i ti\u1ebfn WC- Ph\u01b0\u01a1ng ph\u00e1p \u01b0a th\u00edch \u0111\u1ec3 li\u00ean k\u1ebft l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng tr\u00ean b\u1ec1 m\u1eb7t ch\u1ea5t n\u1ec1n Co.<\/div>\n<h2>4. L\u1ef1a ch\u1ecdn c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 ph\u01b0\u01a1ng ph\u00e1p chu\u1ea9n b\u1ecb<\/h2>\n<div>Theo ph\u00e2n t\u00edch tr\u01b0\u1edbc \u0111\u00f3, vi\u1ec7c \u00e1p d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p l\u1edbp chuy\u1ec3n ti\u1ebfp c\u00f3 th\u1ec3 tri\u1ec7t ti\u00eau hi\u1ec7u qu\u1ea3 hi\u1ec7u \u1ee9ng x\u00fac t\u00e1c \u00e2m c\u1ee7a Co v\u00e0 s\u1ebd kh\u00f4ng l\u00e0m h\u1ecfng ma tr\u1eadn. Tuy nhi\u00ean, \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c hi\u1ec7u qu\u1ea3 ch\u1ee9c n\u0103ng t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng, ph\u01b0\u01a1ng ph\u00e1p l\u1ef1a ch\u1ecdn v\u00e0 chu\u1ea9n b\u1ecb v\u1eadt li\u1ec7u c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp l\u00e0 r\u1ea5t quan tr\u1ecdng. Vi\u1ec7c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u l\u1edbp chuy\u1ec3n ti\u1ebfp th\u01b0\u1eddng y\u00eau c\u1ea7u m\u1ed9t s\u1ed1 nguy\u00ean t\u1eafc sau:<\/div>\n<p>(1) N\u00f3 c\u00f3 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t t\u1ed1t.<\/p>\n<div>Nhi\u1ec7t \u0111\u1ed9 l\u1eafng \u0111\u1ecdng c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng th\u01b0\u1eddng l\u00e0 600 ~ 1200 \u00b0 C, v\u1eadt li\u1ec7u l\u1edbp chuy\u1ec3n ti\u1ebfp c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n, kh\u00f4ng x\u1ea3y ra l\u00e0m m\u1ec1m v\u00e0 n\u00f3ng ch\u1ea3y;<\/div>\n<div>(2) \u0110\u1ed9 c\u1ee9ng v\u00e0 t\u00ednh ch\u1ea5t CTE \u0111\u01b0\u1ee3c \u0111\u1eb7t t\u1ed1t nh\u1ea5t gi\u1eefa kim c\u01b0\u01a1ng v\u00e0 cacbua xi m\u0103ng \u0111\u1ec3 gi\u1ea3m \u1ee9ng su\u1ea5t nhi\u1ec7t g\u00e2y ra b\u1edfi hi\u1ec7u su\u1ea5t kh\u00f4ng kh\u1edbp;<\/div>\n<div>(3) Ng\u0103n ch\u1eb7n Co di chuy\u1ec3n l\u00ean b\u1ec1 m\u1eb7t trong qu\u00e1 tr\u00ecnh l\u1eafng kim c\u01b0\u01a1ng ho\u1eb7c ph\u1ea3n \u1ee9ng v\u1edbi Co \u0111\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c h\u1ee3p ch\u1ea5t \u1ed5n \u0111\u1ecbnh;<\/div>\n<div>(4) N\u00f3 c\u00f3 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch t\u1ed1t v\u1edbi v\u1eadt li\u1ec7u kim c\u01b0\u01a1ng. Kim c\u01b0\u01a1ng c\u00f3 th\u1ec3 t\u1ea1o m\u1ea7m v\u00e0 ph\u00e1t tri\u1ec3n tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp. Trong giai \u0111o\u1ea1n t\u1ea1o m\u1ea7m, kim c\u01b0\u01a1ng c\u00f3 th\u1ec3 nhanh ch\u00f3ng t\u1ea1o m\u1ea7m v\u00e0 c\u00f3 t\u1ed1c \u0111\u1ed9 t\u1ea1o m\u1ea7m cao.<\/div>\n<div>(5) T\u00ednh ch\u1ea5t h\u00f3a h\u1ecdc \u1ed5n \u0111\u1ecbnh v\u00e0 c\u00f3 \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc nh\u1ea5t \u0111\u1ecbnh, \u0111\u1ec3 tr\u00e1nh s\u1ef1 h\u00ecnh th\u00e0nh l\u1edbp trung gian m\u1ec1m v\u00e0 \u1ea3nh h\u01b0\u1edfng x\u1ea5u \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a h\u1ec7 s\u01a1n.<\/div>\n<div>Hi\u1ec7n nay, m\u1ecdi ng\u01b0\u1eddi nghi\u00ean c\u1ee9u v\u00e0 s\u1eed d\u1ee5ng nhi\u1ec1u l\u1edbp chuy\u1ec3n ti\u1ebfp, ch\u1ee7 y\u1ebfu bao g\u1ed3m kim lo\u1ea1i, carbon \/ nitrua kim lo\u1ea1i v\u00e0 c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp h\u1ed7n h\u1ee3p g\u1ed3m ch\u00fang. Trong s\u1ed1 \u0111\u00f3, Cr, Nb, Ta, Ti, Al v\u00e0 Cu th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m v\u1eadt li\u1ec7u l\u1edbp chuy\u1ec3n ti\u1ebfp cho l\u1edbp chuy\u1ec3n ti\u1ebfp kim lo\u1ea1i, v\u00e0 m\u1ea1 PVD, m\u1ea1 \u0111i\u1ec7n v\u00e0 m\u1ea1 \u0111i\u1ec7n th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m ph\u01b0\u01a1ng ph\u00e1p chu\u1ea9n b\u1ecb v\u00e0 ph\u01b0\u01a1ng ph\u00e1p PVD l\u00e0 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u1ea3i nh\u1ea5t. K\u1ebft qu\u1ea3 cho th\u1ea5y l\u1edbp chuy\u1ec3n ti\u1ebfp \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh b\u1edfi kim lo\u1ea1i carbon-philic c\u00f3 hi\u1ec7u qu\u1ea3 h\u01a1n trong vi\u1ec7c c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng so v\u1edbi kim lo\u1ea1i carbon y\u1ebfu. Trong giai \u0111o\u1ea1n \u0111\u1ea7u c\u1ee7a qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng kim c\u01b0\u01a1ng, m\u1ed9t l\u1edbp cacbua \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh \u0111\u1ea7u ti\u00ean tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a l\u1edbp kim lo\u1ea1i, v\u00e0 l\u1edbp cacbua n\u00e0y t\u1ea1o \u0111i\u1ec1u ki\u1ec7n cho qu\u00e1 tr\u00ecnh t\u1ea1o m\u1ea7m v\u00e0 ph\u00e1t tri\u1ec3n c\u1ee7a kim c\u01b0\u01a1ng. Tuy nhi\u00ean, l\u1edbp chuy\u1ec3n ti\u1ebfp kim lo\u1ea1i c\u00f3 CTE l\u1edbn v\u00e0 y\u00eau c\u1ea7u cao v\u1ec1 \u0111\u1ed9 d\u00e0y. N\u1ebfu qu\u00e1 d\u00e0y, n\u00f3 s\u1ebd d\u1eabn \u0111\u1ebfn s\u1ef1 gia t\u0103ng \u1ee9ng su\u1ea5t nhi\u1ec7t, gi\u1ea3m \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft v\u00e0 qu\u00e1 m\u1ecfng \u0111\u1ec3 ng\u0103n ch\u1eb7n ho\u00e0n to\u00e0n s\u1ef1 khu\u1ebfch t\u00e1n ra b\u00ean ngo\u00e0i c\u1ee7a C\u00f4ng ty. Ngo\u00e0i ra, l\u1edbp chuy\u1ec3n ti\u1ebfp kim lo\u1ea1i t\u01b0\u01a1ng \u0111\u1ed1i m\u1ec1m, t\u01b0\u01a1ng \u0111\u01b0\u01a1ng v\u1edbi vi\u1ec7c th\u00eam m\u1ed9t l\u1edbp m\u1ec1m \u1edf gi\u1eefa pha c\u1ee9ng, kh\u00f4ng c\u00f3 l\u1ee3i cho m\u1ee9c \u0111\u1ed9 ph\u00f9 h\u1ee3p c\u1ee7a hi\u1ec7u su\u1ea5t h\u1ec7 th\u1ed1ng l\u1edbp ph\u1ee7.<\/div>\n<div>\u0110\u1ed9 c\u1ee9ng c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp carbon \/ nitride cao h\u01a1n so v\u1edbi kim lo\u1ea1i nguy\u00ean ch\u1ea5t v\u00e0 kh\u00f4ng c\u00f3 v\u1ea5n \u0111\u1ec1 g\u00ec trong vi\u1ec7c gi\u1ea3m hi\u1ec7u su\u1ea5t s\u1eed d\u1ee5ng c\u1ee7a c\u00f4ng c\u1ee5 tr\u00e1ng. WC, TiC, TaC, TaN, CrN, TiN v\u00e0 SiC hi\u1ec7n l\u00e0 nh\u1eefng h\u1ee3p ch\u1ea5t l\u1edbp chuy\u1ec3n ti\u1ebfp \u0111\u01b0\u1ee3c nghi\u00ean c\u1ee9u v\u00e0 s\u1eed d\u1ee5ng nhi\u1ec1u nh\u1ea5t. C\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp nh\u01b0 v\u1eady th\u01b0\u1eddng \u0111\u01b0\u1ee3c chu\u1ea9n b\u1ecb b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 t\u1eeb ph\u1ea3n \u1ee9ng v\u00e0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p kh\u00e1c. C\u00e1c nghi\u00ean c\u1ee9u \u0111\u00e3 ch\u1ec9 ra r\u1eb1ng l\u1edbp chuy\u1ec3n ti\u1ebfp carbon \/ nitride c\u00f3 th\u1ec3 ng\u0103n ch\u1eb7n hi\u1ec7u qu\u1ea3 s\u1ef1 khu\u1ebfch t\u00e1n c\u1ee7a Co v\u00e0 do \u0111\u00f3 c\u00f3 th\u1ec3 c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft c\u1ee7a l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng \u1edf m\u1ed9t m\u1ee9c \u0111\u1ed9 n\u00e0o \u0111\u00f3. M\u1ee9c \u0111\u1ed9 c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft c\u1ee7a c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp nh\u01b0 v\u1eady th\u01b0\u1eddng ph\u1ee5 thu\u1ed9c v\u00e0o s\u1ef1 ph\u00f9 h\u1ee3p c\u1ee7a CTE c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp v\u1edbi ma tr\u1eadn v\u00e0 kim c\u01b0\u01a1ng, c\u1ea5u tr\u00fac c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 \u0111\u1ed9 \u1ea9m c\u1ee7a v\u1eadt li\u1ec7u l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 kim c\u01b0\u01a1ng.<\/div>\n<div>C\u00e1c cacbua kim lo\u1ea1i th\u00f4ng th\u01b0\u1eddng c\u00f3 CTE th\u1ea5p h\u01a1n so v\u1edbi nitrua kim lo\u1ea1i v\u00e0 khi s\u1eed d\u1ee5ng c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp cacbua, kim c\u01b0\u01a1ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u1ea1o h\u1ea1t tr\u1ef1c ti\u1ebfp tr\u00ean l\u1edbp chuy\u1ec3n ti\u1ebfp, r\u00fat ng\u1eafn th\u1eddi gian t\u1ea1o m\u1ea7m so v\u1edbi c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp kim lo\u1ea1i v\u00e0 c\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp nitride. T\u1eeb \u0111\u00f3 ch\u00fang ta c\u00f3 th\u1ec3 th\u1ea5y r\u1eb1ng cacbua l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u chuy\u1ec3n ti\u1ebfp l\u00fd t\u01b0\u1edfng h\u01a1n. Trong s\u1ed1 c\u00e1c v\u1eadt li\u1ec7u cacbua kim lo\u1ea1i n\u00e0y, HfC, NbC, Ta C v\u00e0 t\u01b0\u01a1ng t\u1ef1 c\u00f3 CTE t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p. Ngo\u00e0i ra, SiC phi kim lo\u1ea1i c\u00f3 CTE th\u1ea5p nh\u1ea5t trong t\u1ea5t c\u1ea3 c\u00e1c cacbua (-SiCCTE = 3,8 \u00d7 10-6 \/ \u00b0 C), n\u1eb1m gi\u1eefa cacbua xi m\u0103ng v\u00e0 kim c\u01b0\u01a1ng. Do \u0111\u00f3, c\u00f3 nhi\u1ec1u nghi\u00ean c\u1ee9u v\u1ec1 l\u1edbp chuy\u1ec3n ti\u1ebfp SiC. V\u00ed d\u1ee5, Cabral G v\u00e0 Hei Hongjun \u0111\u00e3 s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p CVD \u0111\u1ec3 chu\u1ea9n b\u1ecb l\u1edbp chuy\u1ec3n ti\u1ebfp SiC tr\u00ean b\u1ec1 m\u1eb7t cacbua xi m\u0103ng \u0111\u1ec3 l\u1eafng \u0111\u1ecdng l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng. K\u1ebft qu\u1ea3 cho th\u1ea5y l\u1edbp chuy\u1ec3n ti\u1ebfp SiC c\u00f3 th\u1ec3 t\u0103ng c\u01b0\u1eddng hi\u1ec7u qu\u1ea3 li\u00ean k\u1ebft gi\u1eefa l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng.<\/div>\n<div>C\u01b0\u1eddng \u0111\u1ed9, nh\u01b0ng ph\u01b0\u01a1ng ph\u00e1p CVD \u0111\u00e3 chu\u1ea9n b\u1ecb tr\u1ef1c ti\u1ebfp l\u1edbp ph\u1ee7 SiC tr\u00ean b\u1ec1 m\u1eb7t c\u1ee7a cacbua xi m\u0103ng, h\u00e0m l\u01b0\u1ee3ng c\u1ee7a ch\u1ea5t k\u1ebft d\u00ednh Co trong ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng kh\u00f4ng d\u1ec5 d\u00e0ng qu\u00e1 cao (th\u01b0\u1eddng l\u00e0 &lt;6%) v\u00e0 c\u1ea7n ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 l\u1eafng \u0111\u1ecdng trong ph\u1ea1m vi th\u1ea5p (th\u01b0\u1eddng l\u00e0 800 \u00b0 C ho\u1eb7c h\u01a1n). \u0110i\u1ec1u n\u00e0y ch\u1ee7 y\u1ebfu l\u00e0 do t\u00e1c \u0111\u1ed9ng x\u00fac t\u00e1c c\u1ee7a pha Co-binder r\u1ea5t c\u00f3 \u00fd ngh\u0129a \u1edf nhi\u1ec7t \u0111\u1ed9 cao, d\u1eabn \u0111\u1ebfn s\u1ef1 h\u00ecnh th\u00e0nh c\u1ee7a r\u00e2u ria SiC, v\u00e0 c\u00f3 m\u1ed9t l\u01b0\u1ee3ng l\u1edbn kho\u1ea3ng tr\u1ed1ng gi\u1eefa c\u00e1c r\u00e2u ria v\u00e0 kh\u00f4ng th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng l\u00e0m l\u1edbp chuy\u1ec3n ti\u1ebfp . Tuy nhi\u00ean, \u1edf nhi\u1ec7t \u0111\u1ed9 l\u1eafng th\u1ea5p, l\u1edbp ph\u1ee7 SiC v\u00f4 \u0111\u1ecbnh h\u00ecnh l\u1ecfng l\u1ebbo d\u1ec5 x\u1ea3y ra. Do \u0111\u00f3, m\u1ed9t ph\u1ea1m vi nhi\u1ec7t \u0111\u1ed9 l\u1eafng \u0111\u1ecdng d\u00e0y \u0111\u1eb7c, li\u00ean t\u1ee5c v\u00e0 \u0111\u00e1p \u1ee9ng vi\u1ec7c s\u1eed d\u1ee5ng l\u00e0m l\u1edbp \u0111\u1ec7m c\u1ee7a l\u1edbp ph\u1ee7 SiC \u0111\u01b0\u1ee3c l\u00e0m nh\u1ecf h\u01a1n. Do \u0111\u00f3, khi m\u1ed9t s\u1ed1 nh\u00e0 nghi\u00ean c\u1ee9u s\u1eed d\u1ee5ng SiC l\u00e0m l\u1edbp chuy\u1ec3n ti\u1ebfp, \u0111\u1ec3 c\u00f3 \u0111\u01b0\u1ee3c \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft cao, tr\u01b0\u1edbc ti\u00ean c\u1ea7n s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p kh\u1eafc \u0111\u1ec3 lo\u1ea1i b\u1ecf Co trong l\u1edbp h\u1ee3p kim c\u1ee9ng. Do \u0111\u00f3, h\u00e0nh \u0111\u1ed9ng x\u00fac t\u00e1c c\u1ee7a Co \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng y\u1ebfu t\u1ed1 ch\u00ednh h\u1ea1n ch\u1ebf vi\u1ec7c s\u1eed d\u1ee5ng SiC l\u00e0m l\u1edbp chuy\u1ec3n ti\u1ebfp.<\/div>\n<div>L\u1edbp chuy\u1ec3n ti\u1ebfp h\u1ed7n h\u1ee3p n\u00f3i chung l\u00e0 m\u1ed9t l\u1edbp ph\u1ee7 nhi\u1ec1u l\u1edbp bao g\u1ed3m s\u1ef1 k\u1ebft h\u1ee3p c\u1ee7a hai ho\u1eb7c nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u carbon \/ nitride kim lo\u1ea1i ho\u1eb7c kim lo\u1ea1i. Hi\u1ec7n t\u1ea1i, c\u00f3 nhi\u1ec1u l\u1edbp chuy\u1ec3n ti\u1ebfp h\u1ed7n h\u1ee3p bao g\u1ed3m W \/ Al, W \/ WC, CrN \/ Cr v\u00e0 ZrN \/. Mo, TaN-Mo v\u00e0 9x (TaN \/ ZrN) \/ TaN \/ Mo, v.v., c\u0169ng ch\u1ee7 y\u1ebfu l\u00e0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p PVD ho\u1eb7c CVD. C\u00e1c l\u1edbp chuy\u1ec3n ti\u1ebfp nh\u01b0 v\u1eady th\u01b0\u1eddng bao g\u1ed3m l\u1edbp r\u00e0o c\u1ea3n khu\u1ebfch t\u00e1n Co v\u00e0 l\u1edbp th\u00fac \u0111\u1ea9y t\u1ea1o m\u1ea7m gi\u1ed1ng kim c\u01b0\u01a1ng, ngh\u0129a l\u00e0 c\u00e1c y\u00eau c\u1ea7u ch\u1ee9c n\u0103ng c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp \u0111\u01b0\u1ee3c th\u1ecfa m\u00e3n ho\u00e0n to\u00e0n b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng v\u1eadt li\u1ec7u \u0111a l\u1edbp h\u1ee3p l\u00fd. So v\u1edbi l\u1edbp chuy\u1ec3n ti\u1ebfp kim lo\u1ea1i \u0111\u01a1n v\u00e0 l\u1edbp chuy\u1ec3n ti\u1ebfp carbon \/ nitride, l\u1edbp chuy\u1ec3n ti\u1ebfp h\u1ed7n h\u1ee3p c\u00f3 l\u1ee3i h\u01a1n trong vi\u1ec7c c\u1ea3i thi\u1ec7n c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft gi\u1eefa l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng v\u00e0 ch\u1ea5t n\u1ec1n cacbua xi m\u0103ng. Tuy nhi\u00ean, \u0111\u1ec3 c\u00f3 \u0111\u01b0\u1ee3c l\u1edbp chuy\u1ec3n ti\u1ebfp h\u1ed7n h\u1ee3p v\u1edbi hi\u1ec7u su\u1ea5t tuy\u1ec7t v\u1eddi, nh\u00ecn chung c\u1ea7n ph\u1ea3i th\u1ef1c hi\u1ec7n l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u v\u00e0 thi\u1ebft k\u1ebf h\u1ee3p l\u00fd. M\u1eb7t kh\u00e1c, hi\u1ec7u qu\u1ea3 mong \u0111\u1ee3i c\u00f3 th\u1ec3 kh\u00f4ng \u0111\u1ea1t \u0111\u01b0\u1ee3c do s\u1ef1 kh\u00e1c bi\u1ec7t l\u1edbn v\u1ec1 t\u00ednh ch\u1ea5t v\u1eadt l\u00fd c\u1ee7a v\u1eadt li\u1ec7u ho\u1eb7c s\u1ed1 l\u01b0\u1ee3ng giao di\u1ec7n t\u0103ng l\u00ean.<\/div>\n<div>T\u1eeb quan \u0111i\u1ec3m c\u1ee7a ph\u01b0\u01a1ng ph\u00e1p chu\u1ea9n b\u1ecb c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp, hi\u1ec7n t\u1ea1i, c\u00e1c nh\u00e0 nghi\u00ean c\u1ee9u ch\u1ee7 y\u1ebfu s\u1eed d\u1ee5ng l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd (PVD), m\u1ea1 \u0111i\u1ec7n, m\u1ea1 \u0111i\u1ec7n v\u00e0 CVD \u0111\u1ec3 chu\u1ea9n b\u1ecb l\u1edbp chuy\u1ec3n ti\u1ebfp. L\u1edbp chuy\u1ec3n ti\u1ebfp thu \u0111\u01b0\u1ee3c v\u00e0 ma tr\u1eadn th\u01b0\u1eddng b\u1ecb r\u00e0ng bu\u1ed9c v\u1ec1 m\u1eb7t v\u1eadt l\u00fd ho\u1eb7c ch\u1ec9 t\u1ed3n t\u1ea1i. M\u1ed9t l\u1edbp khu\u1ebfch t\u00e1n d\u00e0y nanomet, th\u00eam m\u1ed9t ho\u1eb7c nhi\u1ec1u giao di\u1ec7n m\u1edbi gi\u1eefa l\u1edbp ph\u1ee7 kim c\u01b0\u01a1ng \/ n\u1ec1n xi m\u0103ng. M\u1ed9t s\u1ef1 thay \u0111\u1ed5i \u0111\u1ed9t ng\u1ed9t v\u1ec1 c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd nh\u01b0 CTE v\u00e0 \u0111\u1ed9 c\u1ee9ng gi\u1eefa v\u1eadt li\u1ec7u c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 WC-Co c\u0169ng s\u1ebd g\u00e2y ra c\u00e1c v\u1ea5n \u0111\u1ec1 c\u0103ng th\u1eb3ng li\u00ean v\u00f9ng, v\u00e0 \u1ee9ng su\u1ea5t giao thoa n\u00e0y s\u1ebd t\u0103ng l\u00ean khi t\u0103ng \u0111\u1ed9 d\u00e0y c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 s\u1ed1 l\u1edbp chuy\u1ec3n ti\u1ebfp, \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn m\u1ed9t m\u1ee9c \u0111\u1ed9 n\u00e0o \u0111\u00f3. T\u0103ng c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft. H\u01a1n n\u1eefa, ngo\u00e0i SiC, v\u1eabn c\u00f3 s\u1ef1 kh\u00e1c bi\u1ec7t l\u1edbn v\u1ec1 c\u00e1c t\u00ednh ch\u1ea5t nh\u01b0 CTE v\u00e0 \u0111\u1ed9 c\u1ee9ng gi\u1eefa c\u00e1c v\u1eadt li\u1ec7u l\u1edbp chuy\u1ec3n ti\u1ebfp v\u00e0 kim c\u01b0\u01a1ng kh\u00e1c, kh\u00f4ng c\u00f3 l\u1ee3i cho vi\u1ec7c c\u1ea3i thi\u1ec7n \u0111\u1ed9 b\u1ec1n li\u00ean k\u1ebft. Do \u0111\u00f3, \u0111\u1ec3 kh\u00e1m ph\u00e1 m\u1ed9t ph\u01b0\u01a1ng ph\u00e1p chu\u1ea9n b\u1ecb m\u1edbi c\u1ee7a l\u1edbp chuy\u1ec3n ti\u1ebfp, \u0111\u1ec3 c\u00f3 \u0111\u01b0\u1ee3c l\u1edbp chuy\u1ec3n ti\u1ebfp v\u1edbi \u0111\u1ed9 d\u1ed1c c\u1ee7a th\u00e0nh ph\u1ea7n v\u00e0 th\u00e0nh ph\u1ea7n v\u00e0 \u0111\u1ec3 tr\u00e1nh s\u1ef1 c\u0103ng th\u1eb3ng giao di\u1ec7n g\u00e2y ra b\u1edfi giao di\u1ec7n m\u1edbi, \u0111i\u1ec1u \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng l\u00e0 t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 li\u00ean k\u1ebft c\u1ee7a kim c\u01b0\u01a1ng l\u1edbp \u00e1o.<\/div>\n<\/div>\n<\/div>\n<p><!-- .vgblk-rw-wrapper --><\/p>","protected":false},"excerpt":{"rendered":"<p>1. CVD Diamond Introduction Chemical Vapor Deposition (CVD) diamond refers to the use of CVD method, under low pressure conditions, with carbon-containing gases such as H2 and CH4 as the reaction gas, chemical reactions under plasma-assisted and certain temperature conditions, resulting in solid particle deposition Diamond obtained on the heated substrate surface. Similar to natural&#8230;<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[79],"tags":[],"jetpack_featured_media_url":"","jetpack_sharing_enabled":true,"_links":{"self":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts\/1840"}],"collection":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/comments?post=1840"}],"version-history":[{"count":0,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/posts\/1840\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/media?parent=1840"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/categories?post=1840"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.meetyoucarbide.com\/vi\/wp-json\/wp\/v2\/tags?post=1840"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}